Softwares

Source Codes

 

OpenMPL

An open-source MPL layout decomposition tool

 

OpenILT

An open-source Platform for Inverse Lithography Technology

 

OpenDRC

An open-source GPU-accelerated design rule checking (DRC) tool

 

TorchLitho

An open-source framework that models the core components of lithography as differentiable segments.

Tools Released

  • MPLD: MPL layout decomposition

  • TPLEC: TPL layout decomposition with End-Cutting

  • TPLPlace: TPL aware Detailed Placement

  • EBLOW: EBL overlapping aware stencil planning

  • DFI: Dummy Fill Insertion