%PDF-1.4
%
1 0 obj
<>
endobj
2 0 obj
<>
endobj
3 0 obj
<>stream
IEEE
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems;2021;40;7;10.1109/TCAD.2020.3015903
Bridging the Gap Between Layout Pattern Sampling and Hotspot Detection via Batch Active Learning
Active learning
hotspot detection
lithography
sampling
Haoyu Yang
Shuhe Li
Cyrus Tabery
Bingqing Lin
Bei Yu
endstream
endobj
4 0 obj
<>stream
x+ |
endstream
endobj
5 0 obj
<>stream
xn0D+f R^T
Hl#p7*zL5{ёf5).CiﭥWq4g4|2G轉9H]in{.ZFswo
XSTJ|
endstream
endobj
6 0 obj
<>stream
x+ |
endstream
endobj
7 0 obj
<>stream
xN@)&,T]p
̥3>$'.STbd{J`E6XabKb`CWֱB:
]~(9s11G/yR:+>ʲD=bu[byVJE':?>
endstream
endobj
8 0 obj
<>stream
x+ |
endstream
endobj
9 0 obj
<>stream
xK0WRAj(XyhGڜz<;<_%?HFw3kU,qZCaqeCw0ֱAJ\
a)OSIq1شF# Ah)jJu86Xy'b^F=>
endstream
endobj
10 0 obj
<>stream
x+ |
endstream
endobj
11 0 obj
<>stream
xKo@WMR,%iJ;&n zKgIN~M)P-x^(,Zo[Obt\kNг%GqeCw2c?AZ|+XwN&`?d;O4A22TJϲ,q::y˵g10tSCo:lj>~
endstream
endobj
12 0 obj
<>stream
x+ |
endstream
endobj
13 0 obj
<>stream
xKo@WeMIXi-Atfhޱ9wm8GQ왒H̢|zL"Eύ6.t^
6:tGÿ:7Hw1g|?K݆|NF#Y8MP{q(GU2࣪*^vrYC=-L]RM{z g>
endstream
endobj
14 0 obj
<>stream
x+ |
endstream
endobj
15 0 obj
<>stream
xn0s,J[(=Qk*)J4{ZsJa Rܙ^do==" 771")5;Z5s -bCnbzgiPi(GAgYNIo&Xz)LP@{a>
endstream
endobj
16 0 obj
<>stream
x+ |
endstream
endobj
17 0 obj
<>stream
xN@)&,h]Q-C`>}$'AISTbeO,566{|GjN0%Cѡk_ >Ŝ, 1`?q4q
endstream
endobj
18 0 obj
<>stream
x+ |
endstream
endobj
19 0 obj
<>stream
xˊ@D+j9dG@A;z%;~ҍ~bUQ왒/$xu"_ڸ !4{ɰѡ+ߵu쟐
+1g<l:Lxo)
@e:sZvѳmgRhO[z>
endstream
endobj
20 0 obj
<>stream
x+ |
endstream
endobj
21 0 obj
<>stream
xn0s B ʉH\#p`l
S4;ZaSKL4lxm-
>x{BGB>ZX]߬kqgle?HuJqꝅ~MDPM<ެP{i)o3ۆY\@u=Riv>
endstream
endobj
22 0 obj
<>stream
x+ |
endstream
endobj
23 0 obj
<>stream
xn@)β&I!qKtk`.6;|{J牧X@%{
izm},߈?}Agm\:d6:tᇶRc#]k5Th$I{P}0R7*iOO>
endstream
endobj
24 0 obj
<>stream
x+ |
endstream
endobj
25 0 obj
<>stream
xKo@W&A|h]i-83_;NkE3/)[,h:Bm\:d\u쟐;1
"laZ)h$_Y
endstream
endobj
26 0 obj
<>stream
x+ |
endstream
endobj
27 0 obj
<>stream
xn0D+f Rb^T
Hl#p7*zL5{ёf5x]H4Kf`ه8~3>#r$Į|7sx@j|`-Fl#9j1N
U@}
endstream
endobj
28 0 obj
<>
endobj
29 0 obj
<>
endobj
30 0 obj
<>
endobj
31 0 obj
<>stream
x%[ltY5ؑx *LiZUa!
4n-$inb'v;$4mMڦMaMcH Q=ч!
ɉPR8?p>ji`>^٣
va8%js-ٺSO=>f3PnA;FFI/_=wk0Qx?8l^_1vlƞc&NytBAo_སۇ'Q :Fջglָ
|]Af|Tܽb,"'Ri4ZXrZJT.D/6QkЏWO1YBM960y9cJx1:HA Dž<?J̽R
n5'UDT[VtW5D~{V߅u^oy>y\z+1fp"5nL}b $FL`+NF2ZVʅel9[;S5DӣWc#`'݈&aegbnvi&5ˈ$pIqBPgܙr*АngFn%\ lVR"^*l涐mNT=76u]{Q\f1I}pHЄ\eL"|t&Fg訇FZnd~h3U|tΏFFm1Bۙq+:![
wgQE50odֆ#v增%)v
R8D"$\ZֆM!>^{ H.zpOV,uem*kkܸS[DN
cڙ9=V!к}|m[6S͌
endstream
endobj
32 0 obj
<>
endobj
33 0 obj
<>/ExtGState<>/ProcSet[/PDF/Text/ImageB]/Font<>/XObject<>>>/CropBox[0 0 612 792]/Parent 43 0 R/Rotate 0/MediaBox[0 0 612 792]>>
endobj
34 0 obj
<>stream
h[[sF~#%"@_pɛ,ɲ$>@$"& &V~>eϥq!(+3[*}|wC͋^/×7/"?e2Q%~u'>ˇs?f _|B<
:
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ŧOw90?8=;Z+lqqNnC^]t{{svx!HŇ/nS;oCWwWQk|)fi
?oE \a႐<;S,~!G<7Xڃ)w?7k]B/}wd3-J
p9*
;*jWo@5S4i;y/nYM/7,ؒS:gvU=vHK+9t7WUlv6*96_EUrl_]ѧןl۬q#p<^UU^\gMS3"1|Mٮ?۸Ay6Zq+R33Y_}+i^>Z/B(gKhA83̑@hx\5G9m&ڷ5 ^ PSWn}PV§C
/Lh(·e(
N#Y U+eB#58uU/-͂uW`^ m*^n#Hqe'|pGy?xhnv*>5,R``{;ۻv\qk.y1]bx$ m ,zJ@hX
GH"`yv EIx@
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}} S6/owD=~k+t|]5_~ {,J+QrUɳ5H<ơ״$X@:dx5K
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ffLZdcbwSxDM3lUpiguY1>&5PkKb^3(m21DR#,Q40{LIbdL(DVFN:='#6O|߸FSÅoްI˅HU*h2ߊDczPysƸTHNG"d$״նZW 22#0;Z- jG+-:giZ
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